首页> 外国专利> Method of measuring landed dot, measuring apparatus for landed dot, liquid droplet ejection apparatus, method of manufacturing electro-optic apparatus, electro-optic apparatus, and electronic apparatus

Method of measuring landed dot, measuring apparatus for landed dot, liquid droplet ejection apparatus, method of manufacturing electro-optic apparatus, electro-optic apparatus, and electronic apparatus

机译:测量着陆点的方法,用于着陆点的测量设备,液滴喷射设备,制造电光设备的方法,电光设备和电子设备

摘要

A landed dot measuring method in which a topology measuring apparatus having an interferometer measures topology of a landed dot which is a functional liquid droplet landed on an inspection sheet when an inspection ejection for a functional liquid droplet ejection head is performed including: inspection-ejecting in which multiple ejection nozzles of a functional liquid droplet ejection head inspection-eject one by one at a time interval while the functional liquid droplet ejection head is moved in a main scanning direction relatively with respect to the inspection sheet and; and measuring in which respective topologies of multiple landed dots are measured while the topology measuring apparatus follows the functional liquid droplet ejection head and moves in the main scanning direction at a same speed as the functional liquid droplet ejection head relatively with respect to the inspection sheet.
机译:着陆点测量方法,其中,具有干涉仪的拓扑测量设备测量着陆点的拓扑,该着陆点是在执行功能液滴喷射头的检查喷射时落在检查片上的功能液滴的方法,包括:功能液滴喷头的多个喷嘴在相对于检查片相对于主扫描方向相对于主扫描方向移动的状态下,每隔一个时间间隔一次地喷出。相对于检查片,拓扑测量装置跟随功能液滴喷射头并以与功能液滴喷射头相同的速度沿主扫描方向移动,并且在其中测量多个着陆点的各个拓扑。

著录项

  • 公开/公告号US8366232B2

    专利类型

  • 公开/公告日2013-02-05

    原文格式PDF

  • 申请/专利权人 HIROFUMI SAKAI;

    申请/专利号US20080012765

  • 发明设计人 HIROFUMI SAKAI;

    申请日2008-02-05

  • 分类号B41J29/393;

  • 国家 US

  • 入库时间 2022-08-21 16:42:54

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