首页> 外国专利> METHOD OF MEASURING LANDED DOT, MEASURING APPARATUS FOR LANDED DOT, LIQUID DROPLET EJECTION APPARATUS, METHOD OF MANUFACTURING ELECTRO-OPTIC APPARATUS, ELECTRO-OPTIC APPARATUS, AND ELECTRONIC APPARATUS

METHOD OF MEASURING LANDED DOT, MEASURING APPARATUS FOR LANDED DOT, LIQUID DROPLET EJECTION APPARATUS, METHOD OF MANUFACTURING ELECTRO-OPTIC APPARATUS, ELECTRO-OPTIC APPARATUS, AND ELECTRONIC APPARATUS

机译:测量着陆点的方法,着陆点的测量装置,液体液滴喷射装置,制造电光装置的方法,电光装置和电子装置

摘要

A method and an apparatus of measuring a landed dot, a liquid droplet ejection apparatus, a method of manufacturing an electro-optic apparatus, the electro-optic apparatus, and an electronic apparatus are provided to plot a picture without a stripe non-uniformity by accurately measuring a shape of the landed dot. An apparatus of measuring a landed dot measures a shape of the landed dot, which is deposited on a test sheet(171), using an interferometer(181). A head transfer unit relatively moves a functional droplet spray head in a main scanning direction with respect to the test sheet. A shape measuring unit measures the shape of the landed dot. A measuring unit transfer unit relatively moves the shape measuring unit in a sub scanning direction with respect to the test sheet. A controller(7) controls the droplet spray head, the head transfer unit, the shape measuring unit, and the measuring unit transfer unit. The controller tests plural spray nozzles of the droplet spray head one by one, while relatively moving the droplet spray head in the main scanning direction. The shape measuring unit is moved behind the droplet spray head, while measuring shapes of the landed dot.
机译:提供一种测量着陆点的方法和设备,液滴喷射设备,制造电光设备的方法,电光设备和电子设备,以通过以下方式绘制图像而没有条纹不均匀性:准确测量着陆点的形状。测量着陆点的设备使用干涉仪(181)测量沉积在测试片(171)上的着陆点的形状。头传送单元使功能性液滴喷雾头相对于测试片沿主扫描方向相对移动。形状测量单元测量着陆点的形状。测量单元传送单元相对于测试片在副扫描方向上相对移动形状测量单元。控制器(7)控制液滴喷射头,喷头传送单元,形状测量单元和测量单元传送单元。控制器在使液滴喷头沿主扫描方向相对移动的同时,一个接一个地测试液滴喷头的多个喷嘴。在测量着陆点的形状的同时,将形状测量单元移至液滴喷头的后面。

著录项

  • 公开/公告号KR20080079212A

    专利类型

  • 公开/公告日2008-08-29

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORPORATION;

    申请/专利号KR20080016718

  • 发明设计人 SAKAI HIROFUMI;

    申请日2008-02-25

  • 分类号G02B5/20;

  • 国家 KR

  • 入库时间 2022-08-21 19:53:08

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