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METHOD OF MEASURING LANDED DOT, MEASURING APPARATUS FOR LANDED DOT, LIQUID DROPLET EJECTION APPARATUS, METHOD OF MANUFACTURING ELECTRO-OPTIC APPARATUS, ELECTRO-OPTIC APPARATUS, AND ELECTRONIC APPARATUS
METHOD OF MEASURING LANDED DOT, MEASURING APPARATUS FOR LANDED DOT, LIQUID DROPLET EJECTION APPARATUS, METHOD OF MANUFACTURING ELECTRO-OPTIC APPARATUS, ELECTRO-OPTIC APPARATUS, AND ELECTRONIC APPARATUS
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机译:测量着陆点的方法,着陆点的测量装置,液体液滴喷射装置,制造电光装置的方法,电光装置和电子装置
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摘要
A method and an apparatus of measuring a landed dot, a liquid droplet ejection apparatus, a method of manufacturing an electro-optic apparatus, the electro-optic apparatus, and an electronic apparatus are provided to plot a picture without a stripe non-uniformity by accurately measuring a shape of the landed dot. An apparatus of measuring a landed dot measures a shape of the landed dot, which is deposited on a test sheet(171), using an interferometer(181). A head transfer unit relatively moves a functional droplet spray head in a main scanning direction with respect to the test sheet. A shape measuring unit measures the shape of the landed dot. A measuring unit transfer unit relatively moves the shape measuring unit in a sub scanning direction with respect to the test sheet. A controller(7) controls the droplet spray head, the head transfer unit, the shape measuring unit, and the measuring unit transfer unit. The controller tests plural spray nozzles of the droplet spray head one by one, while relatively moving the droplet spray head in the main scanning direction. The shape measuring unit is moved behind the droplet spray head, while measuring shapes of the landed dot.
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