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METHOD OF MEASURING MINORITY CARRIER DIFFUSION LENGTH AND METHOD OF MANUFACTURING SILICON WAFER
METHOD OF MEASURING MINORITY CARRIER DIFFUSION LENGTH AND METHOD OF MANUFACTURING SILICON WAFER
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机译:少数载流子扩散长度的测量方法和硅晶片的制造方法
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摘要
A method of measuring a diffusion length of a minority carrier in a silicon wafer by a surface photovoltage method including irradiating the surface-treated silicon wafer with ultraviolet radiation in an oxygen-containing atmosphere, and measuring a diffusion length of a minority carrier in a silicon wafer by a surface photovoltage method.
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