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INTEGRATED CIRCUIT SYSTEM EMPLOYING STRESS-ENGINEERED SPACERS

机译:集成应力系统间隔的集成电路系统

摘要

An integrated circuit system that includes: providing a substrate including a first region with a first device and a second device and a second region with a resistance device; configuring the first device, the second device, and the resistance device to include a first spacer and a second spacer; forming a stress inducing layer over the first region and the second region; processing at least a portion of the stress inducing layer formed over the first region to alter the stress within the stress inducing layer; and forming a third spacer adjacent the second spacer of the first device and the second device from the stress inducing layer.
机译:一种集成电路系统,包括:提供衬底,该衬底包括具有第一器件和第二器件的第一区域以及具有电阻器件的第二区域;将第一装置,第二装置和电阻装置配置为包括第一隔离物和第二隔离物;在第一区域和第二区域上形成应力诱导层;处理形成在第一区域上方的应力诱导层的至少一部分,以改变应力诱导层内的应力;并从应力产生层形成与第一器件的第二间隔物和第二器件的第二间隔物相邻的第三间隔物。

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