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Non-resonant drive for adaptive trajectory of a scanner system having a MEMS device
Non-resonant drive for adaptive trajectory of a scanner system having a MEMS device
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机译:用于具有MEMS装置的扫描仪系统的自适应轨迹的非谐振驱动
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摘要
Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may be driven in a non-resonant mode of operation. The drive signal provided to the MEMS device may be tailored to prevent the MEMS device from exhibiting resonance characteristics and to cause the MEMS device to operate non-resonantly. In one or more embodiments, a filter may be used to tailor the frequency components of the drive signal, for example to sufficiently attenuate frequency components at or near the resonant frequency of the drive signal. A direct current signal may be provided to the MEMS device to provide an offset to scanned light beam for example to provide beam steering, and the sweep range and/or sweep frequency may be adjusted for example to steer the scanning field of view off axis from the user pointing axis.
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