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GAS CLUSTER ION BEAM EMITTING APPARATUS AND METHOD FOR IONIZATION OF GAS CLUSTER
GAS CLUSTER ION BEAM EMITTING APPARATUS AND METHOD FOR IONIZATION OF GAS CLUSTER
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机译:气体团簇离子束发射装置和用于气体团簇电离的方法
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摘要
An emitting apparatus 50 has a gas cluster generation chamber 2 and a nozzle 3 as means for generating a gas cluster and emitting the gas cluster to a processing object 10. A group of gas clusters jetted from the nozzle 3 is shaped into a gas cluster stream 8 in a beam form when passing through a skimmer 4. Electrons are emitted from an electron gun 12 to the gas cluster stream 8, whereby the gas cluster in the gas cluster stream is ionized.
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