Method of Measuring Transverse Sensitivity of Sensor for Detecting Acceleration and Acceleration Measuring Method

摘要

A sensor obtains transverse sensitivity in a sensitivity matrix of an acceleration sensor with a uniaxial vibration generator. The acceleration is measured by vibrating the table 12. As the measurement of the main axis sensitivity, transverse sensitivity S_zx associated with the X-axis is obtained from measured results of the acceleration sensor 5 and measured results of a measuring instrument for measuring the surface motion of the table 12 independently. Likewise, transverse sensitivity S_zy associated with the Y-axis is obtained by fixing on the table 12 the cubical block on which the acceleration sensor 5 is mounted in such a manner that the Y-axis direction defined with respect to the acceleration sensor 5 aligns with the vibration direction of the table 12.