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Magnetic disk drive, preamplifier for magnetic disk drive, flexible printed cable assembly for magnetic disk drive

机译:磁盘驱动器,用于磁盘驱动器的前置放大器,用于磁盘驱动器的柔性印刷电缆组件

摘要

Embodiments of the present invention help to improve the cost, mountability, and reliability of a magnetic disk drive that regulates a fly height of a magnetic head slider correspondingly to the operating altitude of the drive by using an air pressure sensor and a heater. According to one embodiment, a preamplifier is a semiconductor chip formed by three-dimensionally laminating thin film circuits on a bulk silicon wafer. An air pressure sensor is integrally formed on the semiconductor chip through a semiconductor process. The air pressure sensor is configured to include an isolating cavity, a diaphragm that deflecting in response to a change in a pressure difference between the isolating cavity and the outside, and lower and upper electrodes and for detecting variation in electrostatic capacitance. The preamplifier including the air pressure sensor integrally formed therein is attached to a flexible printed cable (FPC) to oppose the FPC. A through-hole is provided in a portion opposite the air pressure sensor of the FPC to introduce air pressure in an operating environment into a diaphragm of the air pressure sensor.
机译:本发明的实施例有助于提高磁盘驱动器的成本,可安装性和可靠性,该磁盘驱动器通过使用气压传感器和加热器来根据驱动器的工作高度来调节磁头滑块的浮动高度。根据一个实施例,前置放大器是通过在体硅晶片上三维层压薄膜电路而形成的半导体芯片。气压传感器通过半导体工艺一体地形成在半导体芯片上。空气压力传感器被构造成包括隔离腔,响应于隔离腔与外部之间的压力差的变化而偏转的隔膜,以及下部和上部电极,并且用于检测静电电容的变化。包括一体地形成在其中的气压传感器的前置放大器被附接到柔性印刷电缆(FPC)以与FPC相对。在与FPC的气压传感器相对的部分中设置有通孔,以将操作环境中的气压引入气压传感器的膜片中。

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