Method for in-gas micro/nanoimprinting of bulk metallic glass

摘要

A method for in-gas micro/nanoimprinting of bulk metallic glass includes steps of preparing a die, heating the bulk metallic glass and in-gas micro/nanoimprinting of the bulk metallic glass. In the step of preparing a die, the die has a micro/nano structure having multiple depressions and a flow channel connected to the depressions. In the step of heating the bulk metallic glass, the bulk metallic glass is heated to a temperature between a glass transition temperature and a crystallization temperature of the bulk metallic glass. In the step of in-gas micro/nanoimprinting, the bulk metallic glass is forced into the die in presence of gas to imprint a complementing micro/nano structure on the bulk metallic glass. Because the die has a flow channel to allow air or gas to escape from the micro/nano structure of the die, the micro/nanoimprinting can be performed in presence of air or gas.