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Metrics independent and recipe independent fault classes
Metrics independent and recipe independent fault classes
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机译:独立于指标和配方的故障类别
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摘要
A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fault signature was generated using a second metric and/or a second recipe. At least one fault class that is associated with the fault signature is identified.
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