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Gold-Tin Solder Joints Having Reduced Embrittlement

机译:金锡焊点减少了脆化

摘要

A metal interconnection for two workplaces such as a semiconductor chip and an insulating substrate. The first workpiece (101) has a first contact pad (201) with a gold stud (110); the second workplace (103) is covered with an insulating layer (213) and a window in the layer to a second contact pad (211). The interconnection between the second pad and the gold stud is a 278° C. eutectic structure (111) with about 80 weight percent gold and about 20 weight percent tin. The eutectic structure has a Young's modulus of 59.2 GPa and a lamellar micro-structure of the phases Au5Sn and AuSn. There is substantially no metallic tin at the second contact pad.
机译:用于两个工作场所的金属互连,例如半导体芯片和绝缘基板。第一工件( 101 )具有带金钉( 110 )的第一接触垫( 201 );第二个工作间( 103 )覆盖有绝缘层( 213 )和该层中通往第二个接触垫( 211 )的窗口。第二焊盘和金钉之间的互连是具有约80重量百分比的金和约20重量百分比的锡的278°C共晶结构( 111 )。共晶结构的杨氏模量为59.2 GPa,Au 5 Sn和AuSn相的层状微结构。在第二接触垫处基本上没有金属锡。

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