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Elimination of write head plating defects using high activation chemically amplified resist

机译:使用高活化化学放大抗蚀剂消除写入头电镀缺陷

摘要

Methods of forming a component of a thin film magnetic head and improving the plating of a component of a thin film magnetic head are provided. The methods include the use of a high activation energy chemically amplified photoresist (CARS) that is contacted with a low pH high saturation magnetic moment plating solution to form a magnetic head component that is essentially free of plating defects. The methods find utility in hard disk drive applications, such as in the manufacture of magnetic poles for the write head of a hard disk drive.
机译:提供了形成薄膜磁头的部件并改善薄膜磁头的部件的镀覆的方法。该方法包括使用高活化能化学放大光致抗蚀剂(CARS),其与低pH高饱和磁矩电镀液接触形成基本上没有电镀缺陷的磁头组件。该方法在硬盘驱动器应用中有用,例如在用于硬盘驱动器的写头的磁极的制造中。

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