首页>
外国专利>
Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
展开▼
机译:用于在较高测试压力下检测大泄漏的微量气体泄漏的系统和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Trace gas leak detectors and methods for trace gas leak detection of large leaks at relatively high test pressures are provided. A trace gas leak detector includes a test port to receive a sample containing a trace gas, the test port connected to a test line, a mass spectrometer to detect the trace gas, a high vacuum pump having an inlet port coupled to the inlet of the mass spectrometer, and a forepump having a main inlet, at least one intermediate inlet and an exhaust. The main inlet of the forepump is coupled to the exhaust port of the high vacuum pump. The intermediate inlet is controllably connected to the test line. The forepump is selected from the group consisting of a scroll vacuum pump and a screw vacuum pump.
展开▼