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Filling narrow and high aspect ratio openings using electroless deposition
Filling narrow and high aspect ratio openings using electroless deposition
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机译:使用化学沉积填充窄高纵横比的开口
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摘要
Methods of fabricating an interconnect utilizing an electroless deposition technique, which fundamentally consists of providing a dielectric material layer having an opening extending into the dielectric material from a first surface thereof, and electrolessly depositing a conductive material within the opening. Various processing steps and structures may be utilized in the fabrication of the interconnect, which may include but is not limited to forming barrier layers, utilizing seed materials, utilizing activation materials, and treating the dielectric material to be receptive to electroless deposition.
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