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CMOS thin film transistor comprising common gate, logic device comprising the CMOS thin film transistor, and method of manufacturing the CMOS thin film transistor

机译:包括共栅的CMOS薄膜晶体管,包括该CMOS薄膜晶体管的逻辑器件以及制造该CMOS薄膜晶体管的方法

摘要

A complementary metal oxide semiconductor (CMOS) thin film transistor including a common gate, a logic device including the CMOS thin film transistor, and a method of manufacturing the CMOS thin film transistor are provided. In one embodiment, the CMOS thin film transistor includes a base substrate and a semiconductor layer formed on the base substrate. A PMOS transistor and an NMOS transistor are formed on a single semiconductor layer to intersect each other, and a common gate is formed on the intersection area. In addition, a Schottky barrier inducing material layer is formed on a source and a drain of the PMOS transistor.
机译:提供了一种包括公共栅极的互补金属氧化物半导体(CMOS)薄膜晶体管,包括该CMOS薄膜晶体管的逻辑器件以及制造该CMOS薄膜晶体管的方法。在一个实施例中,CMOS薄膜晶体管包括基础衬底和形成在基础衬底上的半导体层。 PMOS晶体管和NMOS晶体管形成在单个半导体层上以彼此相交,并且公共栅极形成在相交区域上。另外,在PMOS晶体管的源极和漏极上形成肖特基势垒诱导材料层。

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