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Heavy-load nanopositioner with dual-parallel flexure design
Heavy-load nanopositioner with dual-parallel flexure design
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机译:具有双重平行弯曲设计的重载纳米定位器
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摘要
A positioning device for heavy loads is provided. The positioning device includes a frame and a stage disposed or integrally defined within the frame. The stage is dimensioned and configured to be translatable within the frame in at least one axis of motion. At least one dual-parallel flexure connects the stage to the frame.
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