Through structure of connecting line at gastight chamber, and ejection system incorporating same; method of manufacturing LCD device, organic EL device, electron emitting device, PDP device, electrophoresis display device, color filter, and organic EL; and method of forming spacer, metal wiring, lens, resist, and light diffuser

摘要

There is provided a through structure of connecting lines extending through a wall of a gastight chamber. The through structure of the connecting lines is capable of positively sealing between the wall and the connecting lines extending therethrough. The through structure enables the connecting lines to extend through the wall of the gastight chamber for connecting a work processing apparatus contained in the gastight chamber and accessories for the work processing apparatus. The through structure comprises a through sleeve extending through the wall, with the connecting lines extending therethrough, a first seal member filled in the through sleeve for sealing between the through sleeve and the connecting lines, and a second seal member for sealing between the through sleeve and the wall.