THROUGH STRUCTURE OF CONNECTION LINE IN AIRTIGHT CHAMBER, EJECTION DEVICE COMPRISING THE SAME, METHOD OF PRODUCING LCD, METHOD OF PRODUCING ORGANIC EL DEVICE, METHOD OF PRODUCING ELECTRON EMISSION DEVICE, METHOD OF PRODUCING PDP DEVICE, METHOD OF PRODUCING ELECTROPHORESIS DISPLAY, METHOD OF PRODUCING COLOR FILTER, METHOD OF PRODUCING ORGANIC EL, SPACER FORMING METHOD, METAL WIRING FORMING METHOD, LENS FORMING METHOD, RESIST FORMING METHOD, AND PHOTO DIFFUSER FORMING METHOD

摘要

To provide a through-like structure, and a discharge device with this, of the connection line in the airtight chamber that can be reliably seal between the connection lines to the wall and through this, the airtight chamber with the task.; Penetration of a work processing apparatus (2) and its ancillary devices attached to the line (6) to the connecting line (6) connecting (4) through the wall (33) of the airtight chamber 31 is accommodated in the airtight chamber 31 in the structure, and at the same time that the connection line (6) inserted into the filled in the interior of the through sleeve 61 and, through the sleeve (61) penetrating the wall (33) connected through the sleeve 61, line 6 It is provided with a first seal member 63 and, through a second sleeve seal (64) for sealing between 61 and the wall 33 to seal between.