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Method of measuring the leakage current of a deep trench isolation structure
Method of measuring the leakage current of a deep trench isolation structure
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机译:测量深沟槽隔离结构的泄漏电流的方法
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摘要
The trench leakage current of a deep trench isolation structure is measured. The deep trench isolation structure, which is filled with polysilicon, contacts both a first region of a first conductivity type and a second region of a second conductivity type, and is proximate to a third region of the first conductivity type formed in the second region. Test voltages are applied to the structures and the leakage current is measured.
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