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Probability of fault function determination using critical defect size map
Probability of fault function determination using critical defect size map
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机译:使用关键缺陷大小图确定故障函数的可能性
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摘要
Methods, systems and program products for determining a probability of fault (POF) function using critical defect size maps. Methods for an exact or a sample POF function are provided. Critical area determinations can also be supplied based on the exact or sample POF functions. The invention provides a less computationally complex and storage-intensive methodology.
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