首页> 外国专利> POSITIVE PHOTORESIST COMPOSITION, THICK FILM PHOTORESIST LAMINATE, METHOD FOR PRODUCING THICK FILM RESIST PATTERN, AND METHOD FOR PRODUCING CONNECTING TERMINAL

POSITIVE PHOTORESIST COMPOSITION, THICK FILM PHOTORESIST LAMINATE, METHOD FOR PRODUCING THICK FILM RESIST PATTERN, AND METHOD FOR PRODUCING CONNECTING TERMINAL

机译:正性光致抗蚀剂组合物,厚膜光致抗蚀剂层压板,厚膜抗蚀剂图案的制造方法以及连接端子的方法

摘要

This positive photoresist composition is a positive photoresist composition for exposing to light having one or more wavelengths selected from g-rays, h-rays and i-rays, comprising: (A) a compound which generates an acid under irradiation with active rays or radiation, and (B) a resin whose solubility in an alkali is enhanced by an action of an acid, wherein the component (A) contains an onium salt (A1) having a naphthalene ring in the cation moiety.
机译:该正性光刻胶组合物是用于暴露于具有选自g射线,h射线和i射线的一种或多种波长的光的正性光刻胶组合物,其包含:(A)在活性射线或辐射的照射下产生酸的化合物。 (B)通过酸的作用而提高了在碱中的溶解性的树脂,其中,(A)成分在阳离子部分含有具有萘环的鎓盐(A1)。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号