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INTEGRATED SEMICONDUCTOR AND TRANSITION-METAL OXIDE NANOSTRUCTURES AND METHODS FOR PREPARING SAME

机译:集成的半导体和过渡金属氧化物纳米结构及其制备方法

摘要

This invention encompasses methods for the preparation of a series of nanostructures and nanostructured devices, as well as the devices prepared by this method. The innovation pertains to methods of materials synthesis for producing bottom-up nanostructures with integration of technologically important semiconductor materials (Si, SiGe, Ge, GaAs, GaN, CdSe and other group IV, III- V and II- VI) with a class of technologically important functional oxide materials known as transition metal oxides. The methods benefit from being inexpensive, robust, and controllable in terms of component composition, hierarchal design flexibility, and component thicknesses. The nanostructures produced by these methods have the added benefit of their transferability to other non-traditional substrates and/or platforms. The devices enabled by this method include semiconductor nanostructures that are enhanced by transition metal oxide components for non-volatile memories, nanoscale magnetoresistive spintronic devices, transistors, transducers, and single-molecule detectors. The bottom-up nanotechnology and scales approaching one-dimensional behavior translate to reduced fabrication cost and increased device performance.
机译:本发明包括用于制备一系列纳米结构和纳米结构器件的方法,以及通过该方法制备的器件。该创新涉及用于合成自下而上的纳米结构的材料合成方法,该方法将具有技术重要性的半导体材料(Si,SiGe,Ge,GaAs,GaN,CdSe和其他IV,III-V和II-VI类)集成在一起。技术上重要的功能性氧化物材料,称为过渡金属氧化物。该方法得益于廉价,坚固且可控制的组件组成,层次设计灵活性和组件厚度。通过这些方法生产的纳米结构具有向其他非传统基材和/或平台转移的额外好处。通过这种方法启用的设备包括通过用于非易失性存储器的过渡金属氧化物成分增强的半导体纳米结构,纳米级磁阻自旋电子设备,晶体管,换能器和单分子检测器。自底向上的纳米技术和接近一维行为的规模转化为降低的制造成本和更高的器件性能。

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