首页>
外国专利>
APPARATUS AND METHOD FOR SIMULTANEOUS INSPECTION AT DIFFERENT DEPTHS BASED ON THE PRINCIPLE OF FREQUENCY DOMAIN OPTICAL COHERENCE TOMOGRAPHY
APPARATUS AND METHOD FOR SIMULTANEOUS INSPECTION AT DIFFERENT DEPTHS BASED ON THE PRINCIPLE OF FREQUENCY DOMAIN OPTICAL COHERENCE TOMOGRAPHY
展开▼
机译:基于频域光学相干断层扫描原理的不同深度同时检查的装置和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Exemplary embodiments of an apparatus are provided. For example, the exemplary apparatus can include at least one first arrangement providing at least one first electro- magnetic radiation to a sample, at least one second electro-magnetic radiation to a first reference and at least one third electro-magnetic radiation to a second reference. A frequency of radiation provided by the first arrangement generally varies over time. The exemplary apparatus may also include at least one second arrangement which is configured to detect a first interference between at least one fourth electro-magnetic radiation associated with the first electro-magnetic radiation and at least one fifth electro-magnetic radiation associated with the second radiation. The second arrangement is also configured to detect a second interference between at least one sixth electro-magnetic radiation associated with the first electro-magnetic radiation and at least one seventh electro-magnetic radiation associated with the third radiation.
展开▼