首页> 外国专利> APPARATUS AND METHOD FOR SIMULTANEOUS INSPECTION AT DIFFERENT DEPTHS BASED ON THE PRINCIPLE OF FREQUENCY DOMAIN OPTICAL COHERENCE TOMOGRAPHY

APPARATUS AND METHOD FOR SIMULTANEOUS INSPECTION AT DIFFERENT DEPTHS BASED ON THE PRINCIPLE OF FREQUENCY DOMAIN OPTICAL COHERENCE TOMOGRAPHY

机译:基于频域光学相干断层扫描原理的不同深度同时检查的装置和方法

摘要

Exemplary embodiments of an apparatus are provided. For example, the exemplary apparatus can include at least one first arrangement providing at least one first electro- magnetic radiation to a sample, at least one second electro-magnetic radiation to a first reference and at least one third electro-magnetic radiation to a second reference. A frequency of radiation provided by the first arrangement generally varies over time. The exemplary apparatus may also include at least one second arrangement which is configured to detect a first interference between at least one fourth electro-magnetic radiation associated with the first electro-magnetic radiation and at least one fifth electro-magnetic radiation associated with the second radiation. The second arrangement is also configured to detect a second interference between at least one sixth electro-magnetic radiation associated with the first electro-magnetic radiation and at least one seventh electro-magnetic radiation associated with the third radiation.
机译:提供了设备的示例性实施例。例如,示例性装置可以包括至少一个第一装置,其向样品提供至少一个第一电磁辐射,向第一参考物提供至少一个第二电磁辐射,并且向第二参考物提供至少一个第三电磁辐射。参考。由第一布置提供的辐射频率通常随时间变化。该示例性装置还可包括至少一个第二装置,其被配置为检测与第一电磁辐射相关联的至少一个第四电磁辐射与与第二辐射相关联的至少一个第五电磁辐射之间的第一干扰。 。第二布置还被配置为检测与第一电磁辐射相关联的至少一个第六电磁辐射与与第三辐射相关联的至少一个第七电磁辐射之间的第二干扰。

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