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A METHOD FOR MANUFACTURING A DEVICE USING IMPRINT LITHOGRAPHY AND DIRECT WRITE TECHNOLOGY
A METHOD FOR MANUFACTURING A DEVICE USING IMPRINT LITHOGRAPHY AND DIRECT WRITE TECHNOLOGY
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机译:利用光刻技术和直接写技术制造器件的方法
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摘要
The present invention provides a method for manufacturing, as well as a method for manufacturing an integrated circuit. The method for manufacturing, among others, may include forming one or more devices of a first type over a substrate using imprint lithography, and forming one or more devices of a second type over the substrate using a direct write technology.
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