Substrate cassette, substrate transporting apparatus, substrate storage and transporting apparatus, and substrate transporting and insertion/transporting and removal system

摘要

This substrate transporting apparatus is provided with a substrate cassette (1) in which a plurality of glass substrates (4) are housed horizontally in stages in a vertical direction, a substrate conveying means that is inserted and removed in the substrate cassette (1) by reciprocation in a direction perpendicular to the conveying direction, and a cassette elevating mechanism that lifts and lowers the substrate cassette (1). The substrate conveying means is provided with a plurality of pairs of conveying rollers (24) that respectively support the opposite side edges (4a and 4b) on the bottom surface of the glass substrates (4) and a hand (26) that is longer than the conveying rollers (24) in a direction perpendicular to the direction along which the glass substrates (4) are conveyed. The top surface (26A) of this hand (26) has air holes (27a) that can supply air from an air blower to enable support of the glass substrates (4) in a non-contact state.