SYSTEM FOR MEASURING SURFACE ROUGHNESS AND MEHTOD OF MEASURING SURFACE ROUGHNESS

摘要

A system and a method for measuring surface roughness are provided to save cost by minimizing abrasion of a probe and measuring surface roughness of a film accurately. A system for measuring surface roughness comprises a diameter measuring unit(100), a data storage unit(200), an operation unit(300) and an output unit(400). The diameter measuring unit measures the horizontal diameter of a projection of a film. The data storage unit includes stored data on the height of the projection according to the horizontal diameter. The operation unit estimates surface roughness of the film by comparing information on the diameter with the data inputted from the data storage unit. The output unit displays the surface roughness estimated from the operation unit.