SYSTEM FOR MEASURING SURFACE ROUGHNESS AND MEHTOD OF MEASURING SURFACE ROUGHNESS

摘要

The surface roughness measurement system according to the present invention is membrane diameter measuring unit for measuring the horizontal diameter of the protruding portion , membrane diameter information of the data storage unit , the diameter membrane protrusions measured in the measurement unit for storing data about the height of the protrusions according to the horizontal diameter of the projecting portion is entered , data is input from the data storage section , the diameter an output unit for displaying a surface roughness is calculated from the operation unit and operation unit and information for calculating the data are compared to the film surface roughness .