ALIGNMENT DEVICE, METHOD FOR RESETTING ORIGIN OF ALIGNMENT DEVICE, AND TURN TABLE, TRANSLATION TABLE, MACHINE AND MACHINE CONTROL SYSTEM EQUIPPED WITH ALIGNMENT DEVICE

摘要

An alignment device of table rotation through translation drive in which the table can be operated with high precision XYR, YR or R. Each of four drive systems for driving a table (4) mounting an object (5) comprises a freely translating section (11), a translation drive section (12), and a freely rotating section (13). A machine securing device (41) is provided with a motor (1) and a detector (2) and the table (4) is secured accurately by the machine securing device (41) using first and second alignment devices and first and second position fixing devices. The alignment device can be reset to the origin by storing the reference position of the detector in a device (44) for storing the reference position of the detector.