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ALIGNMENT DEVICE, METHOD FOR RESETTING ORIGIN OF ALIGNMENT DEVICE, AND TURN TABLE, TRANSLATION TABLE, MACHINE AND MACHINE CONTROL SYSTEM EQUIPPED WITH ALIGNMENT DEVICE
ALIGNMENT DEVICE, METHOD FOR RESETTING ORIGIN OF ALIGNMENT DEVICE, AND TURN TABLE, TRANSLATION TABLE, MACHINE AND MACHINE CONTROL SYSTEM EQUIPPED WITH ALIGNMENT DEVICE
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机译:校准装置,重置校准装置的原点的方法,以及具有该校准装置的转台,翻译台,机器和机器控制系统
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摘要
An alignment device of table rotation through translation drive in which the table can be operated with high precision XYθ, Yθ or θ. Each of four drive systems for driving a table (4) mounting an object (5) comprises a freely translating section (11), a translation drive section (12), and a freely rotating section (13). A machine securing device (41) is provided with a motor (1) and a detector (2) and the table (4) is secured accurately by the machine securing device (41) using first and second alignment devices and first and second position fixing devices. The alignment device can be reset to the origin by storing the reference position of the detector in a device (44) for storing the reference position of the detector.
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