APPARATUS AND METHOD OF WHITE-LIGHT INTERFEROMETRY FOR 3-D PROFILE MEASUREMENTS WITH LARGE FIELD OF VIEW USING MACRO LENSES

摘要

A white-light scanning interferometer for large-sized three-dimensional profile measurement using macro lenses and a method for measuring a three-dimensional profile are provided to change the most suitable visual region for the size of an object to be measured by using the zoom function of a macro lens. A light source(100) radiates white light. A light splitter(110) divides the white light into measuring light and reference light in order to irradiate the white light on a measuring surface and a reference surface. A macro lens(140) receives an interference pattern by using the reference light reflected from the measuring surface and the reference surface. An image acquisition unit(150) acquires the received interference pattern of the macro lens. The shape of the measuring surface is measured by using the interference pattern of the image acquisition unit.