TOUCH CLEANING APPARATUS FOR LARGE AREA SUBSTRATE

摘要

A contact-type cleaning apparatus for a large-area substrate is provided to avoid the deterioration of cleaning force while preventing a large-area substrate from being damaged by including a plurality of surface contact brushes that come in contact with a substrate to clean the substrate by a predetermined transfer. A transfer part(20) transfers a large-area substrate(10). A plurality of upper surface brushes(30,40) comes in surface-contact with the upper surface of the transferred large-area substrate to clean the upper surface of the large-area substrate. An upper driving part drives an upper driving axis connected to the plurality of upper surface brushes to reciprocate the upper surface brush while the upper brush comes in contact with the upper surface of the large-area brush. A plurality of lower surface brushes(50,60) come in surface-contact with the lower surface of the transferred large-area substrate to clean the lower surface of the large-area substrate. A lower driving part drives a lower driving axis connected to the plurality of lower surface brushes to reciprocate the lower surface brush while the lower surface brush comes in contact with the lower surface of the large-area substrate. The upper or lower surface brush can inject cleaning water to a contact portion of the upper or lower surface brush and the large-area substrate.