AUTOMATED PROCESS CONTROL USING OPTICAL METROLOGY WITH A PHOTONIC NANOJET

摘要

An automated process control method using optical metrology with a photonic nanojet is provided to determine the existence of a structure in an inspection region with an obtained measurement of a retro-reflected light. An automated process control method using optical metrology with a photonic nanojet includes the steps of: performing a manufacturing process on a wafer using a first manufacturing cluster; generating a photonic nanojet, which is an optical intensity pattern induced in a shadow side surface of a dielectric microsphere(102); scanning an inspection region with the photonic nanojet(104); obtaining a measured value of retro-reflected light from the dielectric microsphere as the inspection region is scanned with the photonic nanojet(106); determining an existence of a structure in the inspection region with the obtained measured value of the retro-reflected light(108); and adjusting at least one process parameter of the first manufacturing cluster based on the determination of the existence of the structure in the inspection region.