SUBSTRATE TEST PROBING EQUIPMENTS HAVING FORCING PART IN TEST HEAD AND FORCE-RECEIVING PATTERN IN PROBE CARD AND METHODS OF USING THE SAME

摘要

Substrate test probing equipment having a force-receiving pattern in a probe card and a forcing part in a test head and usage methods thereof are provided to restrict thermal expansion of a probe card forcibly by contacting the force-receiving pattern to the forcing part and then applying physical force to the force-receiving pattern by the forcing part. In substrate test probing equipment(112), a substrate mover(108) has an upper side. A test head(30) has a resisting plate(RP) positioned on the substrate mover and a forcing part(FP) facing the substrate mover to contact with the resisting plate and extend from the resisting plate. A probe card is disposed between the test head and the substrate mover. In the probe card, a circuit board has upper and lower sides. A force-receiving plate has a force-receiving pattern recessed or protruded to be disposed on the upper side of the circuit plate. The force-receiving plate is fixed on the upper side of the circuit plate to penetrate through the upper and lower sides of the circuit plate. A pin supporting plate is disposed at the lower side of the circuit plate, surrounded by the force-receiving plate, and electrically connected to the circuit plate. An information processing unit(104) is electrically coupled with the probe card, the test head, and the substrate mover. The force-receiving plate corresponds to the resisting plate. The force-receiving pattern contacts with the forcing part. The forcing part applies physical force to the force-receiving pattern.