Micromechanical comb structure as well as the acceleration sensor and the drive with this comb structure

摘要

Micromechanical comb structure with:a first dedicated (10) with a plurality of tines (201 to 105);a second dedicated (20) with a plurality of tines (201 to 205);whereinthe tines (101 to 105) of the first dedicated (10), and the tines (201 to 205) of the second dedicated (20), mesh with one another in such a way that, in order to form respective sensor - and / or actuator capacitors are arranged;characterized in thatthe tines (101 to 105; 201 to 205) at least one of the comb means (10; 20) are designed in such a way that a variation of the natural mechanical frequencies of the prongs of the a dedicated (101 to 105; 201 to 205) is obtained.