An organic antireflective coating polymer, an antireflective coating composition comprising such a polymer, and methods of making the same

摘要

Novel anthracene compounds are claimed. Novel anthracene compounds of formula (I) are claimed. [Image] R : H or methyl; R a, R b, R 1-R 9H, OH, -OCOCH 3, -COOH, -CH 2OH, 1-5C alkyl, alkoxyalkyl; m : 1-5. Independent claims are included for: (i) a process for the preparation of compounds of formula (I) by condensation of anthracene oxime with acyl monomer in the presence of a lauric acid catalyst system; (ii) a process for the production of compounds of formula (II) by reaction of a compound of formula (I) with hydroxyacrylate monomer in a solvent followed by polymerization of the resulting product with a polymerization initiator; (iii) an anti-reflective coating composition containing a compound of formula (I); and (iv) a semiconductor device prepared using the anti-reflective coating. [Image] R' : H or methyl; m,n : 1-5; x,y : 0.01-0.99.