positivresist composition and method for formation of resistmustern by using the same

摘要

A positive resist - a composition comprising:a resin - component (a), which is under the action of acid an increased solubility in alkali, wherein said resin - component (a) comprises a copolymer (a1), which contains:(i) a structural unit (a1), which is covered by an acrylic acid esters or methacrylic acid esters is derived and one acid cleavable, the resolution of preventing group, wherein the structural unit (a1) at least one of a shown at the bottom of general formula (i) or a general formula (ii) is selected entity: in which r is a hydrogen atom or a methyl group and r¹ an alkyl group having 2 to 5 carbon atoms, and in which r is a hydrogen atom or a methyl group and r² and r³ in each case independently of one another is an alkyl group having 1 to 5 carbon atoms, ..