Micro-mechanical device for use as e.g. micro-mechanical actuator, has membrane with membrane plane, and electrodes that run perpendicular to membrane plane and are provided in suspension area

摘要

The device (50) has a substrate (1), and a membrane (20) with a membrane plane (20a) suspended by a suspension area (60). The suspension area runs perpendicular to the membrane plane. Electrically insulated electrodes (61, 62) run perpendicular to the membrane plane, and are provided in the suspension area. The membrane and/or suspension area has two portions provided with different mechanical stress conditions in the suspension area, where one of the portions is an inner area of the membrane. An independent claim is also included for a method for manufacturing a micro-mechanical device.