Electron beam vaporization apparatus has hood between crucible and substrate to be coated which is in form of frustrum of cone or pyramid with narrow end near substrate, window in mantle wall allowing electron beam to penetrate

摘要

Electron beam vaporization apparatus has a hood (9) between the crucible (4) and substrate (3) to be coated. This is in the form of a frustrum of a cone or pyramid with the narrow end near the substrate. A window (10) in the mantle wall allows the electron beam (7) to penetrate.