Crystallization under 1 MeV Electron Beam Irradiation of Nanometer-sized W-dendrites Fabricated on Alumina Substrates with Electron-beam-induced Deposition

摘要

Nanometer-sized W-dendritic form structure was fabricated with electron-beam-induced deposition (EBID) in a 200 kV transmission electron microscope. The as-prepared nanodendrites are composed of W-nanocrystals and amorphous. The as-prepared nanodendrites were then irradiated with 1 MeV electron beam in a high voltage transmission electron microscope. The effect of the irradiation is investigated. The irradiation transformed effectively almost all the amorphous part to crystalline state. Morphology of the nanodendrite also changes. The irradiation induced crystallization and morphology change are discussed.