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Semiconductor component for producing integrated circuits and transistors with deformed channel area, has crystalline semiconductor area, gate electrode, which is formed in crystalline semiconductor area with channel area

机译:用于制造具有变形的沟道面积的集成电路和晶体管的半导体部件具有结晶半导体区域,栅电极,该栅电极形成在具有沟道面积的结晶半导体区域中

摘要

The semiconductor component (100) has crystalline semiconductor area, gate electrode (152), which is formed in crystalline semiconductor area, with a channel area. The channel area is defined in a longitudinal direction and a breadth direction. The gate electrode has a biaxial tensile bracing, which causes a biaxial tensile distortion in the channel area along the longitudinal direction and breadth direction channels. The former gate electrode has an area made of polysilicate, and another area made of silicon or germanium. A shaped semiconductor material has shaped silicon or carbon material. An independent claim is also included for a method provided for a recess in a gate electrode of a transistor.
机译:半导体组件(100)具有晶体半导体区域,在晶体半导体区域中形成的具有沟道区域的栅电极(152)。沿纵向和宽度方向限定通道区域。栅电极具有双轴拉伸支撑,其在沿着纵向和宽度方向的沟道的沟道区域中引起双轴拉伸变形。前一个栅电极的一个区域由聚硅酸盐制成,另一个区域由硅或锗制成。成形的半导体材料具有成形的硅或碳材料。还包括针对提供给晶体管的栅电极中的凹部的方法的独立权利要求。

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