Substrate holder for handling substrate material, has valves automatically opened when connecting substrate holder to corroding station and/or to critical-pointy-dryer and closed when separating substrate holder from corroding station

摘要

The substrate holder has two valves (11, 12) that are reversibly lockable. The valves are automatically opened when connecting the substrate holder to a corroding station (20) and/or to a critical-pointy-dryer (30). The valves are automatically closed when separating the substrate holder from the corroding station and/or from the critical-point-dryer. The corroding station is provided for connecting the substrate holder. An independent claim is also included for a method for handling a substrate material.