Acceleration sensor for use in vehicle, has sensor unit, whose frequency transfer function is modified such that sensor unit exhibits small mechanical bandwidth, which corresponds approximately to bandwidth of sensor

摘要

The sensor has micromechanical asymmetrical suspended oscillating masses (5, 6) in the form of a compensator, which is connected with a substrate over torsion springs (1) and an anchorage device (4), so that the oscillating masses are deflected from its rest position through accelerations acting perpendicular to the substrate. A frequency transfer function of a sensor unit is modified through the selection of a value of a mechanical parameter of the sensor unit, such that the sensor unit exhibits a small mechanical bandwidth, which corresponds approximately to a bandwidth of the sensor.