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Increasing the reliability of copper-based specifies metallization structures in a microstructural element, by applying of aluminum nitride
Increasing the reliability of copper-based specifies metallization structures in a microstructural element, by applying of aluminum nitride
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机译:通过应用氮化铝提高微结构元素中铜基特定金属化结构的可靠性
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摘要
By producing a greater than 1: 1 - by a delimiting the interfacial properties of a process can be significantly improved copper-based metallization layer, while nevertheless the entire permittivity of the layer stack remains low.
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