Method for quantitative determination of surface characteristics, involves evaluating local resolution image of surface that is examined

摘要

The method involves evaluating a local resolution image of a surface (8) that is examined, and analyzing measurement values for determining a surface part of the image. A result value of a physical characteristic is determined, where this resultant value is a characteristic for the measurement value of the physical characteristic of all the surface parts. The result value is displayed as opposed to the size of the defined surface parts. An independent claim is also included for a device for quantitative determination of surface characteristics.