Microelectromechanical system type micro-relay for integrated circuit, has upper and lower contacts short-circuited when electrode is placed against upper and lower contacts, respectively, and cells ensuring lateral locking of electrode

摘要

The micro-relay (1) has a free electrode (2) positioned between upper contacts (3.1, 3.2) and lower contacts (4.1, 4.2). TH electrode is moved between the upper and lower contacts such that the upper contacts are short-circuited when the electrode is placed against the upper contacts or the lower contacts are short-circuited when the electrode is placed against the lower contacts. Cells are placed around the electrode and ensure lateral locking of the electrode during displacement between the upper and lower contacts. An independent claim is also included for a method for fabricating a micro-relay.