Methods and apparatus for downstream dissociation of gases

摘要

A method and apparatus for activating and dissociating gases involves generating an activated gas (134) with a plasma(132) located in a chamber(108). A downstream gas input (176) is positioned relative to an output (172) of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas (152) does not substantially interact with an interior surface of the chamber.