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MICROSCOPE, IMAGE BLURRING CORRECTION IMAGING LENS FOR MICROSCOPE, AND IMAGE BLURRING CORRECTION METHOD FOR MICROSCOPE
MICROSCOPE, IMAGE BLURRING CORRECTION IMAGING LENS FOR MICROSCOPE, AND IMAGE BLURRING CORRECTION METHOD FOR MICROSCOPE
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机译:显微镜,用于显微镜的图像模糊校正成像透镜和用于显微镜的图像模糊校正方法
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摘要
PROBLEM TO BE SOLVED: To provide a microscope capable of correcting image blurring caused by the vibration of the microscope, and observing a specimen image without causing any image blurring, to provide an image blurring correction imaging lens used for the microscope, and to provide an image blurring correction method for the microscope.;SOLUTION: The microscope 1 includes: a stage 14; an imaging lens 18 disposed between an objective lens 17 and each of image faces I1 and I2; a driving device that moves the imaging lens within a plane perpendicular to the optical axis of the imaging lens; at least one displacement detection sensor S1 that detects an amount of displacement between the objective lens and stage within the plane orthogonal to the optical axis of the imaging lens; and a control device 22 that moves the imaging lens by the drive of the driving device based on a signal detected by the displacement detection sensor, thereby correcting image blurring on each image face.;COPYRIGHT: (C)2009,JPO&INPIT
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