Digital Image Processing in Ion Microscope Analysis: Methods of Image Quantification

摘要

Two methods of secondary ion image quantification are applied to the analysis of a low-alloy steel, evaluated, and compared. The use of ion implantation for providing an internal standard element and for fabricating 'imaging standards' for evaluation of quantification procedure accuracy is investigated and discussed. A basic philosophy is presented for multi-element, multi-feature analysis using ion images, and the use of effective display with the purpose of conveying meaningful compositional morphological information is investigated. (Author)