MESA TYPE OSCILLATION PIECE, MESA TYPE OSCILLATION DEVICE, AND MANUFACTURING METHOD OF MESA TYPE OSCILLATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mesa type oscillation piece which suppresses unnecessary vibrations while making a plane size small, a mesa type oscillation device and a manufacturing method of the mesa type oscillation device.;SOLUTION: The mesa type oscillation piece 10 includes a mesa part 12 provided with an excitation electrode on a principal plane 12a, and a thin part 14 provided at a side part, which is obtained by being made thinner than the mesa part 12 and united with the mesa part 12 into a single body. When any side constituting edge parts of the thin part 14 is made a base end 26 side, a mount electrode 22 conducting with the excitation electrode 20 is provided on the base end 26 side. A side face 12b of the mesa part 12 existing on the mount electrode 22 side is a mount step part 18 where a conductive adhesive bonds.;COPYRIGHT: (C)2009,JPO&INPIT